The optical profilometer that is under development at the Mechanical Engineering Department of the University of Cagliari (DiMeCa) requires a translation stage able to displace part of the optical system with sub-micrometric resolution. This work describes the development of an interferometric displacement sensor which enables, by its feedback, to accurately control an otherwise open loop controlled electrostrictive translation stage. After a short description of the optical system, the mechanical assembly, the electronic module and the software interface will be described. At the end some experimental result, showing the performances of the sensor will be illustrated.

Sviluppo di un sensore interferometrico per il controllo del posizionamento di un rugosimetro ottico

BALDI, ANTONIO;BERTOLINO, FILIPPO;GINESU, FRANCESCO;
2001-01-01

Abstract

The optical profilometer that is under development at the Mechanical Engineering Department of the University of Cagliari (DiMeCa) requires a translation stage able to displace part of the optical system with sub-micrometric resolution. This work describes the development of an interferometric displacement sensor which enables, by its feedback, to accurately control an otherwise open loop controlled electrostrictive translation stage. After a short description of the optical system, the mechanical assembly, the electronic module and the software interface will be described. At the end some experimental result, showing the performances of the sensor will be illustrated.
2001
Interferometer, roughness, optical sensor
File in questo prodotto:
File Dimensione Formato  
Sviluppo di un sensore interferometrico per il controllo del posizionamento di un rugosimetro ottico .pdf

accesso aperto

Descrizione: Articolo principale
Tipologia: versione editoriale
Dimensione 416.54 kB
Formato Adobe PDF
416.54 kB Adobe PDF Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11584/99510
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? ND
social impact