In this contribution, we propose a protocol for analysis and accurate reconstruction of nanoporous materials by atom probe tomography (APT). The existence of several holes in porous materials makes both the direct APT analysis and reconstruction almost inaccessible. In the past, a solution has been proposed by filling pores with electron beam-induced deposition. Here, we present an alternative solution using an electro-chemical method allowing to fill even small and dense pores, making APT analysis possible. Concerning the 3D reconstruction, the microstructural features observed by electron tomography are used to finely calibrate the APT reconstruction parameters.

Toward an accurate quantification in atom probe tomography reconstruction by correlative electron tomography approach on nanoporous materials

PINNA, ELISA;TIDDIA, MARIAVITALIA;VACCA, ANNALISA;MULA, GUIDO
2017-01-01

Abstract

In this contribution, we propose a protocol for analysis and accurate reconstruction of nanoporous materials by atom probe tomography (APT). The existence of several holes in porous materials makes both the direct APT analysis and reconstruction almost inaccessible. In the past, a solution has been proposed by filling pores with electron beam-induced deposition. Here, we present an alternative solution using an electro-chemical method allowing to fill even small and dense pores, making APT analysis possible. Concerning the 3D reconstruction, the microstructural features observed by electron tomography are used to finely calibrate the APT reconstruction parameters.
2017
Atom probe tomography; Correlation; Electron tomography; Nanoporous; Electronic, optical and magnetic materials; Atomic and molecular physics, and optics; Instrumentation
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11584/218070
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